Visit us at ICIQP 2022!

MNE 2022 is over, next stop is ICIQP 2022!

Last week we attended the MNE 2022 conference in Leuven, Belgium. A big thank you to all attendees and everyone who came by our booth for a chat – it was a pleasure talking to both new and existing customers, and to learn more about your fabrication goals and requirements.

Next, we move our sights to the International Conference on Integrated Quantum Photonics (ICIQP) 2022, which this year is in our home country of Denmark, at the Technical University of Denmark (DTU), in Kgs. Lyngby, from October 5-7. We welcome all attendees to visit our booth for a chat on how Beamfox can accelerate your quantum photonics research.

We hope to see you there!

Beamfox Proximity v1.6.0 out now

We are excited to announce the release of version 1.6.0 of our proximity-effect correction software, Beamfox Proximity! The new version brings several highly-requested features, as well as a large number of improvements and bug-fixes. At the Downloads page, new users can download a 30-day, fully featured, free trial of the new version, and existing users can upgrade their current version free of charge. Read the full story to learn what is new in Beamfox Proximity.

Advanced polygon operations

We have added an all-new Polygon operations menu in the user interface, which contains new features that give the user more advanced controls and enables new possibilities for fabrication. This includes the option to resize polygons, one of the most highly-requested features by our users.

With the resize polygons option, all polygons in the mask will be grown/shrunk by the user specified amount before fracturing and PEC. This feature can be useful in many scenarios, but is especially useful when a consistent bias, e.g., from etching, is prevalent in the fabrication process.

An array of 100-nm squares has been shrunk and subsequently proximity-effect corrected using the polygon resizing option. The grow/shrink setting is here set to -25 nanometers, effectively halving the size of the squares.

Furthermore, it is now also possible to toggle whether or not intersecting polygons should be merged. In previous versions of Beamfox Proximity, this has always been set to on, but it can now also be disabled for specific use cases that require overlapping polygons. It is, however, generally recommend to leave this option on by default, as overlapping polygons may cause double the dose to be applied in certain cases.

CSF export for Raith EBL systems

The option Raith (CSF) can now be selected under E-gun brand. With this enabled, the results of the PEC is now exported as a .CSF file, which is directly supported by the majority of Raith EBL systems. Exporting circles is also supported in the file format.

The possibility to export directly to the CSF file format in Beamfox Proximity should greatly speed up the proximity-effect correction process for users of Raith EBL systems.

Quick reload

The time it takes to reload a mask after proximity-effect correction has been greatly reduced, and is now nearly instantaneous – great if a mistake was made while typing in parameters, or for users who wish to experiment with different settings.

Feedback submission menu

At Beamfox, we greatly appreciate any and all feedback we can get, as we believe it helps make our products better. We have therefore added a menu for submitting feedback directly within the software, which can be found under the Advanced menu. Users can now quickly and easily send in requests for new features, and suggestions for improvements.

Minor upgrades/bug fixes

  • A button to toggle polygon outlines has been added
  • Improved Structure view
  • Improved error and warning messages
  • Increased resolution of application icon
  • Fixed several bugs related to setting default EBL system values
  • Improved handling of polygons with sub-nanometer dimensions

Visit the Downloads page to download the new version.

Join Beamfox at MNE 2022!

We are excited to announce that we will be attending this year’s Micro and Nanoengineering conference (MNE 2022)! The event will take place in less than a month from now, from September 19-23, at the Gasthuisberg academic campus in Leuven, Belgium.

We welcome all attendees to come by the Beamfox booth, #13, for a chat, where we would be happy to discuss your fabrication goals and challenges, and how Beamfox can help advance your research.

We look forward to seeing you there!

Beamfox Proximity v1.5.3 released

Version 1.5.3 of Beamfox Proximity contains critical fixes for bugs introduced in version 1.5.2. It is recommended that all users upgrade to the newest version. The new version can be downloaded at the Downloads page.

New release: Beamfox Proximity v1.5.2

The new version of Beamfox Proximity includes graphical upgrades, minor bug fixes, and improvements to the license engine, making 1.5.2 the most reliable and user-friendly version yet. At the Downloads page, existing users can upgrade to the new version free of charge, while a free trial of the full software is available for new users.

Beamfox Proximity v1.5.1 now ready for download

Beamfox Proximity version 1.5.1

Version 1.5.1 of Beamfox Proximity brings a thoroughly streamlined license activation system alongside minor bug fixes and improvements. The procedure for requesting and activating licenses has been greatly simplified, making it easier than ever to get started using Beamfox Proximity. Visit the Downloads page to start your free trial or upgrade your existing version free of charge.

Beamfox Proximity v1.5.0 released

In Beamfox Proximity version 1.5.0, we have given the graphical user interface an overhaul, making it cleaner and more easy to use than ever before. We have also added native support for the Elionix ELS-F150 beamwriter. At the Downloads page, existing users can update their existing version free of charge, while new users can download a free trial of the full software.

Beamfox Proximity v1.4.1

With this release, we have added support for the Elionix HS50 beamwriter and improved a few minor issues.

Beamfox Proximity v1.4.0 ready for download

With the new version, we have added functionality for selecting the target layer for proximity error correction, and the software can now read self-intersecting polygons (even if that is not recommended). We also added support for UTF-8 characters, added access to previous log files, and made a number of small improvements.

Beamfox Proximity ver. 1.3.1 available now

Our latest release brings a number of exciting new features including advanced layer handling and export to layered GDS for compatibility with generic electron-beam writers. Furthermore, we have implemented a number of minor improvements to the user experience. The download is available now for our existing customers, but if you are new to Beamfox, we suggest that you go to our Download page and give your free trial of Beamfox Proximity ver. 1.3.1 a spin.